Modeling and simulation of advanced annealing processes

Materials Science Forum

Volumn 573-574, Issue , 2008, Pages 279-293

  Martinez Limia, Alberto ^a   Pichler, Peter ^a,b   Steen, Christian ^b   Paul, Silke ^c   Lerch, Wilfried ^c  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^c MATTSON THERMAL PRODUCTS GMBH   (United States)

Author keywords

Arsenic clustering; Arsenic deactivation; Arsenic diffusion; Arsenic precipitation; Arsenic segregation; Flash annealing; Silicon; Spike annealing

Indexed keywords

ARSENIC; BUDGET CONTROL; RAPID THERMAL PROCESSING; SILICON;

ADVANCED ANNEALING; ARSENIC DEACTIVATION; ARSENIC DIFFUSION; CRITICAL EVALUATION; FLASH ANNEALING; MODEL AND SIMULATION; SPIKE ANNEALING; TEMPERATURE PROFILES;

ANNEALING;

EID: 45749104080     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.573-574.279     Document Type: Article

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