On the effect of residual charges on the pull-in parameters of electrostatic actuators

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 563-568

  Bochobza Degani, Ofir ^a   Socher, Eran ^a   Nemirovsky, Yael ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

Actuator; Electrostatic; Model; Pull in; Residual charge

Indexed keywords

DIELECTRIC MATERIALS; ELECTRIC CHARGE; ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATICS; MATHEMATICAL MODELS;

CHARGE DISTRIBUTION; DIELECTRIC COATING LAYER; PULL-IN PARAMETERS; RESIDUAL CHARGE;

ELECTROSTATIC ACTUATORS;

EID: 0036544253     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00870-6     Document Type: Conference Paper

References (9)

1. Characterization of contact electromechanics through capacitance-voltage measurements and simulations
2. Extending the travel range of electrostatic micro-mirrors using insulator coated electrodes
3. A methodology and model for the pull-in parameters of electrostatic actuators
4. Stabilization of electrostatically actuated mechanical devices
5. Electrostatic micromechanical actuator with extended range of travel
6. Speed-energy optimization of electrostatic actuators based on pull-in
7. Analysis of the extended operation of electrostatic actuators by current-pulse drive