MEMS devices for high isolation switching and tunable filtering

IEEE MTT-S International Microwave Symposium Digest

Volumn 2, Issue , 2000, Pages 1217-1220

  Peroulis, Dimitrios ^a   Pacheco, Sergio ^a   Sarabandi, Kamal ^a   Katehi, Linda P B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL SWITCHES; PARALLEL RESONANT SWITCH PACKET;

CAPACITANCE; CAVITY RESONATORS; ELECTRIC FILTERS; ELECTRIC SWITCHES; ELECTROMAGNETIC FIELD THEORY; NATURAL FREQUENCIES; SCATTERING PARAMETERS; WAVEGUIDES;

MICROELECTROMECHANICAL DEVICES;

EID: 0033710577     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)

1. Sergio Pacheco, Clark T. Nguyen and Linda P.B. Katehi, "Micromechanical Electrostatic K-Band Switches", IEEE MTT-S Digest 1998, pp. 1569-1572.
2. Sergio Pacheco and Linda P.B. Katehi, "Micromechanical K-Band Switching Circuits", 29 European Microwave conference 1999, pp 45-48.
3. C. Goldsmith, J. Randall, S. Eshelman, T.H. Lin, D. Denniston, S. Chen, B. Norvell, "Characteristics of Micromachined Switches at Microwave Frequencies", IEEE MTT-S Digest 1996, pp. 1141-1144.
4. Zhiping Feng, Wenge Zhang, Bingzhi Su, Kevin F. Harsh, K.C. Gupta, V. Bright and Y.C. Lee, " Design and Modeling of RF MEMS Tunable Capacitors Using Electro-thermal Actuators", IEEE MTT-S Digest 1999, pp. 1507-1510.
5. Jeremy B. Muldavin, Gabriel M. Rebeiz, "30 GHz Tuned MEMS Switches", IEEE MTT-S Digest 1999, pp. 1511-1514.
6. Zeland's 1E3D, Release 6,1999