An uncooled optically readable infrared imaging detector

Sensors and Actuators, A: Physical

Volumn 133, Issue 1, 2007, Pages 236-242

  Dong, Fengliang ^a   Zhang, Qingchuan ^a   Chen, Dapeng ^b   Pan, Liang ^a   Guo, Zheying ^a   Wang, Weibing ^b   Duan, Zhihui ^a   Wu, Xiaoping ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b INSTITUTE OF MICROELECTRONICS   (China)

Author keywords

Bi material micro cantilever array; Infrared imaging; Optical readout; Uncooled

Indexed keywords

INFRARED IMAGING; READOUT SYSTEMS; SILICON NITRIDE; THERMAL EFFECTS; THERMOMECHANICAL TREATMENT;

AIR CONDUCTION; BI-MATERIAL MICRO-CANTILEVER ARRAYS; NOISE-EQUIVALENT TEMPERATURE DIFFERENCE (NETD); OPTICAL READOUT;

INFRARED DETECTORS;

EID: 33845598579     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.04.031     Document Type: Article

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