Performance analysis of microcantilever arrays for optical readout uncooled infrared imaging

Sensors and Actuators, A: Physical

Volumn 137, Issue 1, 2007, Pages 13-19

  Guo, Zheying ^a   Zhang, Qingchuan ^a   Dong, Fengliang ^a   Chen, Dapeng ^b   Xiong, Zhiming ^a   Miao, Zhengyu ^a   Li, Chaobo ^b   Jiao, Binbin ^b   Wu, Xiaoping ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b INSTITUTE OF MICROELECTRONICS   (China)

Author keywords

FPA; Infrared imaging; Microcantilever; Optical readout; Uncooled

Indexed keywords

OPTICAL FILTERS; OPTICAL PROPERTIES; PYROLYSIS; SENSITIVITY ANALYSIS; THERMAL EFFECTS;

MICROCANTILEVER ARRAYS; OPTICAL READOUT; TEMPERATURE FLUCTUATION; UNCOOLED;

INFRARED IMAGING;

EID: 34249317627     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.02.006     Document Type: Article

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