Micromachined antenna-coupled uncooled microbolometers for terahertz imaging arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5411, Issue , 2004, Pages 18-24

  Miller, A J ^a   Luukanen, A ^a   Grossman, E N ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Air bridge; Microbolometer; Millimeter wave; Planar antenna; Terahertz imaging

Indexed keywords

ANTENNAS; BOLOMETERS; HIGH TEMPERATURE EFFECTS; MILLIMETER WAVES; PHOTOLITHOGRAPHY; SIGNAL DETECTION; SUBSTRATES; THERMAL CONDUCTIVITY;

AIR-BRIDGE; MICROBOLOMETERS; PLANAR ANTENNA; TERAHERTZ IMAGING;

IMAGING TECHNIQUES;

EID: 10044293110     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.543236     Document Type: Conference Paper

References (6)

1. E. N. Grossman and A. J. Miller, "Active millimeter-wave imaging for concealed weapons detection," Proc. SPIE - Int. Soc. Opt. Eng. (USA) vol. 5077, pp. 62-70, 2003.
2. E. N. Grossman, A. K. Bhupathiraju, A. J. Miller, and C. D. Reintsema, "Concealed weapons detection using an uncooled millimeter-wave microbolometer system," Proc. SPIE - Int. Soc. Opt. Eng. (USA) vol. 4719, pp. 364-369, 2002.
3. S. Nolen, T. E. Harvey, C. D. Reintsema, and E. N. Grossman, "Properties of cavity-backed slot-ring antennas at 95 GHz," Proc. SPIE - Int. Soc. Opt. Eng. (USA) vol.4373, pp. 49-57, 2001.
4. E. N. Grossman, S. Nolen, N. G. Paulter, and C. D. Reintsema, "Concealed weapons detection system using uncooled, pulsed, imaging arrays of millimeter-wave bolometers," Proc. SPIE - Int. Soc. Opt. Eng. (USA) vol.4373, pp. 7-15, 2001.
5. A. Luukanen, A. J. Miller, and E. N. Grossman, "Active millimeter-wave video rate imaging with a staring 120-element microbolometer array," Proc. SPIE Int. Soc. Opt. Eng. (USA) these proceedings, 2004.
6. E. N. Grossman, A. Luukanen, and A. J. Miller, "Terahertz active direct detection imagers," Proc. SPIE Int. Soc. Opt. Eng. (USA) these proceedings, 2004.