Monotonic and fatigue testing of freestanding submicron thin beams application for MEMS

Microsystem Technologies

Volumn 14, Issue 7, 2008, Pages 1041-1048

  Lin, Ming Tzer ^a   Tong, Chi Jia ^a   Shiu, Kai Shiang ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

FATIGUE TESTING; LOADS (FORCES); MEMS; OPTICAL RESOLVING POWER; PIEZOELECTRIC ACTUATORS; TENSILE TESTING; THIN FILMS; YIELD STRESS;

MONOTONIC LOADING; ROOM TEMPERATURE; UNLOADING TESTS;

BEAMS AND GIRDERS;

EID: 44249088854     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0463-5     Document Type: Conference Paper

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