Design and development of sub-micron scale specimens with electroplated structures for the microtensile testing of thin films

Microsystem Technologies

Volumn 13, Issue 11-12, 2007, Pages 1559-1565

  Lin, Ming Tzer ^a   Tong, Chi Jia ^a   Chiang, Chung Hsun ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPLATED PRODUCTS; MEMS; SILICON WAFERS; SPUTTERING; TANTALUM COMPOUNDS; TENSILE TESTING;

GOLD-CHROME ALLOYS; HALL-PETCH PREDICTION; MICROTENSILE TESTING; TANTALUM NITRIDE;

THIN FILMS;

EID: 34249817141     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0345-2     Document Type: Conference Paper

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