Impact of minienvironment on Fab capacity and yield

Institute of Environmental Sciences - Proceedings, Annual Technical Meeting

Volumn , Issue , 1995, Pages 118-123

  Shu, Chin yung ^a  

^a TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CLEAN ROOMS; CONTAMINATION; ENVIRONMENTAL ENGINEERING; FACTORY AUTOMATION; INTEGRATED CIRCUIT MANUFACTURE;

FAB 2 MINIENVIRONMENT; SMART TRAVELER SYSTEM; STANDARD MECHANICAL INTERFACE SYSTEM; SUBMICRON WAFER MANUFACTURING; TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0029532483     PISSN: 00739227     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)