Performance evaluation of of cleanroom environmental systems

Journal of the IEST

Volumn 46, Issue , 2003, Pages 66-73

  Xu, Tengfang ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BENCHMARKING; CLEAN ROOMS; ENVIRONMENTAL MANAGEMENT; LABORATORIES; TRANSPORTATION;

CONTAMINATION CONTROL; ENERGY PERFORMANCE; ENVIRONMENTAL PERFORMANCE; ENVIRONMENTAL SYSTEMS; IN-SITU MEASUREMENT; OPERATION AND MAINTENANCE; PERFORMANCE BENCHMARKING; RECOMMENDED PRACTICE;

ENERGY EFFICIENCY;

EID: 6344280009     PISSN: 10984321     EISSN: None     Source Type: Journal    
DOI: 10.17764/jiet.46.1.326183248n101567     Document Type: Article

References (14)

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3. Mills, Evan, Bell, G., Sartor, D., Chen, A., Avery, D., Siminovitch, M., Greenberg, S., Marton, G., de Almeida, A., Lock, L.E, Energy Efficiency in California Laboratory Type Facilities, Lawrence Berkeley National Laboratory Report, LBNL-39061 (1996).
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7. IEST-RP-CC012.1 Considerations in Cleanroom Design. The Institute of Environmental Sciences and Technology (IEST), (1993).
8. 1,2
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14. Schneider, R., "Designing Clean Room HVAC Systems," ASHRAE Journal V. 43, No. 8, pp. 39-46. (August 2001).