Laboratory evaluation of fan-filter units' aerodynamic and energy performance

Journal of the IEST

Volumn 47, Issue , 2004, Pages 116-120

  Xu, Tengfang ^a   Jeng, Ming Shan ^b  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Cleanroom; Efficiency; Energy performance index (EPI); Fan filter unit (FFU)

Indexed keywords

AERODYNAMICS; CLEAN ROOMS; COUPLINGS; ENERGY EFFICIENCY; LABORATORIES; OPTIMIZATION; PERFORMANCE; TEST FACILITIES;

AIR RECIRCULATION; DAMPER COUPLINGS; ENERGY PERFORMANCE INDEX (EDI); FAN-FILTER UNITS (FFU);

FANS;

EID: 6344260666     PISSN: 10984321     EISSN: None     Source Type: Journal    
DOI: 10.17764/jiet.47.1.33g3m40327m78p52     Document Type: Article

References (10)

1. Xu, T. 2004. Considerations for Efficient Airflow Design for Cleanrooms. Journal of the IEST 47:24-28
2. Xu, T. 2003. Performance Evaluation of Cleanroom Environmental Systems. Journal of the IEST. 46:66-73.
3. Lee, A. H., and F. Karman. 2003. Energy Conservation Measures for Industrial Facilities. HPAC Engineering (July): 45-59. Cleveland, OH. http://www.HPAC.com.
4. Jeng, M.S., and F. Tsau. 2002. Fan-Filter Unit (FFU) Test Procedures. Semiconductor Fabtech 15: 77-80.
5. ASHRAE/ANSI Standard 51 (ANSI/AMCA 210-99). 1999. Laboratory Methods of Testing Fans for Rating, Air Movement and Control Association International, Inc., Arlington Heights, IL: American National Standards Institute (ANSI).
6. Jeng, M., and W. Tschudi. 2002. Draft Standard Test Procedure For Fan-Filter Units (not published).
7. Xu, T. (Draft) Laboratory Method of Testing Energy Performance of Fan-Filter Units. Lawrence Berkeley National Laboratory Report, LBNL-54626.
8. ISO 14644-1. 1999. Cleanrooms and associated controlled environments-Part 1: Classification of Air Cleanliness. International Organization for Standardization (ISO).
9. ISO/DIS 14644-3. 2002. Cleanrooms and associated controlled environments-Part 3: Metrology and Test Methods. International Organization for Standardization (ISO).
10. IEST-RP-CC006.2. 1997. Testing Cleanrooms. Rolling Meadows, IL: The Institute of Environmental Sciences and Technology (IEST).