Particle dynamics in a front-opening unified pod/load port unit minienvironment in the presence of a 300 mm wafer in various positions

Aerosol Science and Technology

Volumn 39, Issue 3, 2005, Pages 185-195

  Hu, Shih Cheng ^a   Hsiao, Tong Rong ^a  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANEMOMETERS; COMPUTATIONAL FLUID DYNAMICS; COMPUTER SOFTWARE; FLOW OF FLUIDS; PRESSURE CONTROL; ULTRASONIC DEVICES;

FRONT OPENING UNIFIED POD (FOUP); LOAD PORT UNIT (LPU); PARTICLE DYNAMICS; PRESSURE DIFFERENTIAL CONTROL;

PARTICLES (PARTICULATE MATTER);

AIRFLOW; ANEMOMETER; ARTICLE; COMPUTATIONAL FLUID DYNAMICS; CONTAMINATION; CONTROL SYSTEM; DYNAMICS; MICROENVIRONMENT; MODEL; PARTICLE SIZE; PREDICTION; PRIORITY JOURNAL; STOCHASTIC MODEL; VELOCITY;

EID: 18544378408     PISSN: 02786826     EISSN: None     Source Type: Journal    
DOI: 10.1080/027868290920115     Document Type: Article

References (11)

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