Air flow simulation in a minienvironment

Solid State Technology

Volumn 39, Issue 7, 1996, Pages 201-209

  Tannous, A George ^a,b,c,d  

^a Asyst Technologies Inc   (United States)

^b UNIVERSITY OF TULSA   (United States)

^c CLARKSON UNIVERSITY   (United States)

^d Asyst Minienvironment Business Unit

Author keywords

[No Author keywords available]

Indexed keywords

AIR FILTERS; CLEAN ROOMS; COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; CONTAMINATION; FINITE VOLUME METHOD; OPTIMIZATION;

MINIENVIRONMENTS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030177140     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (8)

1. S. Abuzeid, "Total contamination control: the minienvironment era," 1994 Proc., 17th Intl. Electronics Manufacturing Technology Symposium, Austin, TX (Oct. 2-4, 1995).
2. M. Rappa, "Factors influencing the rate of adoption of minienvironment technology in United States, Japan, Korea and Taiwan," 1994 Proc., 12th Intl. Symp. on Contamination Control, Yokohama, Japan, pp. 503-507 (Oct. 10-14, 1994).
3. C-Y. Shu, "The impact of minienvironment on fab capacity and yield," 1995 Proceedings, Institute of Environmental Sciences' 41st Annual Technical Meeting, Anaheim, CA, pp. 118-123 (April 30-May 5, 1995).
4. A. Gath, R.S. Honold, "Minienvironment requirements from next generation IC technology," 1993 Proc., Microcontamination Conf. and Expo., San Jose, CA, pp. 278-306 (Sept. 21-23, 1993).
5. R. Holzel, "Minienvironment systems, current performance and outlook," 1993 Proc., Microcont. Conf. and Expo., San Jose, CA, pp. 278-287 (Sept., 1993).
6. J.H. Lee, et al., "3-dimensional flow characteristics in a cleanroom after divisional filter exchange," 1994 Proc., 12th Intl. Symposium on Contamination Control, Yokohama, Japan, pp. 209-214 (Oct. 10-14, 1994).
7. P. White, B. MacGibbon, A. Busnaina, 1993 Proc., Microcontamination Conf. and Expo., San Jose, CA, pp. 688-691 (Sept. 21-23, 1993).
8. S. V. Patankar, "Numerical heat transfer and fluid flow," Hemisphere, Washington, DC.