Considerations for efficient airflow design in cleanrooms

Journal of the IEST

Volumn 47, Issue , 2004, Pages 24-28

  Xu, Tengfang ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR CONDITIONING; DATA ACQUISITION; ENERGY EFFICIENCY; GAS EMISSIONS; GREENHOUSE EFFECT; PARTICLE SIZE ANALYSIS; PRESSURE CONTROL; SYSTEMS ANALYSIS;

AIRFLOW RATES; DISTRIBUTED AIR HANDLER UNIT (AHU); FAN-FILTER UNIT (FFU); FAN-TOWER (FT) WITH PRESSURIZED-PLENUM;

STRUCTURAL DESIGN;

EID: 6344255034     PISSN: 10984321     EISSN: None     Source Type: Journal    
DOI: 10.17764/jiet.47.1.y66g4752h3882055     Document Type: Review

References (13)

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2. ISO/DIS 14644-2. 2000. Cleanrooms and associated controlled environments - Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1. Geneva, Switzerland: International Organization for Standardization.
3. Xu, T. 2003. Performance Evaluation of Cleanroom Environmental Systems. Journal of the IEST 46:66-73.
4. Matsuki, M. and N. Tanaka. 1998. Energy Saving System for Air Conditioning of Clean Room for Semiconductor Factory (Estimation of FMU System). Oki Technical Review Vol. 63: Special Issue on Global Environment: UDC [628.83: 621.63-831], http://www.oki.com/en/otr/downloads/otr-160-12.pdf (accessed July 27, 2004).
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8. IEST-RP-CC012.1. 1998. Considerations in Cleanroom Design. Rolling Meadows, IL: The Institute of Environmental Sciences and Technology.
9. Fitzpatrick, M. and K. Goldstein. 2002. Cleanroom Airflows Part II: The Messy Details. CleanRooms, http://cr.pennnet.com/ (accessed July 27, 2004).
10. ISO 14644-4. 2001. Cleanrooms and Associated Controlled Environments - Part 4: Design, construction, and start-up. Geneva, Switzerland: International Organization for Standardization.
11. DeSorbo, M. 2000. Decreased Air Velocity Cuts Costs. Clean-Rooms, http://cr.pennnet.com/ (accessed July 27, 2004).
12. Energy Information Administration, Department of Energy. 2002. Overview of Annual Energy Outlook 2002 (AEO 2002) with Projections to 2020, http://www.eia.doe.gov/oiaf/aeo/index.html (modified November 30, 2002).
13. Xu, T. 2003. Efficient Airflow Design for Cleanrooms Improves Business Bottom Lines. Proceedings of The 49th Annual Technical Meeting. Rolling Meadows, IL: The Institute of Environmental Sciences and Technology.