Factors influencing adhesion of fluorocarbon (FC) thin film on silicon substrate

Thin Solid Films

Volumn 516, Issue 16, 2008, Pages 5673-5680

  Gnanappa, Arun Kumar ^a   Slattery, Orla ^a   Peters, Frank ^a   O'Murchu, Cian ^a   O'Mathuna, Cian ^a   Fahey, Robert ^a   Taylor, J A ^b   Krupenkin, Tom N ^b  

^a UNIVERSITY COLLEGE CORK   (Ireland)

^b NOKIA RESEARCH CENTER   (United States)

Author keywords

Adhesion; Contact angle; Degradation; Fluorocarbon; Hydrophobic; Plasma

Indexed keywords

ADHESION; CONTACT ANGLE; DEGRADATION; FLUOROCARBONS; HYDROPHOBICITY; MICROFLUIDICS; PLASMA THEORY; POLYMER FILMS; SILICON COMPOUNDS;

DEPOSITED FILMS; HYDROPHOBIC POLYMERIC THIN FILMS;

THIN FILMS;

EID: 43949138893     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.07.124     Document Type: Article

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