Residual stress analysis in ferroelectric Pb(Zr0.52Ti0.48)O3 thin films fabricated by a sol-gel process

Applied Physics Letters

Volumn 82, Issue 25, 2003, Pages 4540-4542

  Yao, Kui ^a   Yu, Shuhui ^a   Tay, Francis Eng Hock ^a  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC MATERIALS; LEAD COMPOUNDS; MOLECULAR WEIGHT; POLYETHYLENE GLYCOLS; RESIDUAL STRESSES; SOL-GELS; X RAY DIFFRACTION ANALYSIS;

PRECURSORS;

THIN FILMS;

EID: 0038044785     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1587272     Document Type: Article

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