Ferroelectric properties of Pb(Zi, Ti)O3 capacitor with thin SrRuO3 films within both electrodes

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 4 B, 2000, Pages 2110-2113

  Morimoto, Toyota ^a   Hidaka, Osamu ^a   Yamakawa, Kouji ^a   Arisumi, Osamu ^a   Kanaya, Hiroyuki ^a   Iwamoto, Tsuyoshi ^a   Kumura, Yoshinori ^a   Kunishima, Iwao ^a   Tanaka, Shin Ichi ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

Fatigue; FRAM; Imprint; IrO2; Oxidized electrode; PZT; Reliability; SRO

Indexed keywords

ELECTRIC FIELDS; ELECTRODES; ENERGY DISPERSIVE SPECTROSCOPY; FERROELECTRIC MATERIALS; FERROELECTRICITY; HYSTERESIS; LEAKAGE CURRENTS; RANDOM ACCESS STORAGE; SEMICONDUCTING LEAD COMPOUNDS; STRONTIUM COMPOUNDS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON DISPERSIVE SPECTROSCOPY; IMPRINT; OXIDIZED ELECTRODE; SWITCHING CHARGE;

CAPACITORS;

EID: 0033721762     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.2110     Document Type: Article

References (5)

1. T. Nakamura, Y. Nakao, A. Kamisawa and H. Takasu: Jpn. J. Appl. Phys. 33 (1994) 5207.
2. H. Kanal, Y. Yamashita and K. Yamakawa: Abstr. 11th Int. Symp. Integrated Ferroelectrics, Cororada Spring (1999) 117C.
3. J. S. Cross, M. Fujiki and M. Tsukada: Abstr. 11 th Int. Symp. Integrated Ferroelectrics, Cororada Spring (1999) 1161.
4. T. Morimoto, O. Hidaka, K. Yamakawa, O. Arisumi, H. Kanaya, T. Iwamoto, Y. Kumura, I. Kunishima and S. Tanaka: Ext. Abstr. 1999 Int. Conf. Solid State Device & Materials (Business Center for Academic Societies Japan) Tokyo, p. 396.
5. T. Miyakawa, S. Tanaka, Y. Itoh, Y. Takeuchi, R. Ogiwara, S. Doumae, H. Takenaka, I. Kunishima, S. Shuto, O. Hidaka, S. Otuki and S. Tanaka: Int. Solid State Circuit Conf. San Francisco (1999) Session 6.2.