메뉴 건너뛰기




Volumn 144, Issue 2, 2008, Pages 321-327

Development of serial-connection piezoelectric pumps

Author keywords

Cantilever valve; Micropump; Multi chamber; PZT actuator

Indexed keywords

ELECTRIC POTENTIAL; FLOW RATE; PARAMETER ESTIMATION;

EID: 43549124116     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.01.016     Document Type: Article
Times cited : (92)

References (29)
  • 2
    • 13244251242 scopus 로고    scopus 로고
    • Micropumps-past, progress and future prospects
    • Woias P. Micropumps-past, progress and future prospects. Sens. Actuators B 105 (2005) 28-38
    • (2005) Sens. Actuators B , vol.105 , pp. 28-38
    • Woias, P.1
  • 3
    • 0017904807 scopus 로고
    • An electronically controlled piezoelectric insulin pump and valves
    • SU-25
    • Spencer W.J., Corbett W.T., Dominguez L.R., et al. An electronically controlled piezoelectric insulin pump and valves. IEEE Trans. Son. Ultrason. 3 (1978) 153-156 SU-25
    • (1978) IEEE Trans. Son. Ultrason. , vol.3 , pp. 153-156
    • Spencer, W.J.1    Corbett, W.T.2    Dominguez, L.R.3
  • 4
    • 22244473350 scopus 로고    scopus 로고
    • A PMMA valveless micropump using electromagnetic actuation
    • Yamahata C., Lotto C., Al-Assaf E., et al. A PMMA valveless micropump using electromagnetic actuation. Microfluidics Nanofluidics 1 (2005) 197-207
    • (2005) Microfluidics Nanofluidics , vol.1 , pp. 197-207
    • Yamahata, C.1    Lotto, C.2    Al-Assaf, E.3
  • 5
    • 34547567571 scopus 로고    scopus 로고
    • Theoretical analysis and optimization of electromagnetic actuation in a valveless microimpedance pump
    • Chang H.-T., Lee C.-Y., Wen C.-Y., et al. Theoretical analysis and optimization of electromagnetic actuation in a valveless microimpedance pump. Microelectron. J. 38 (2007) 791-799
    • (2007) Microelectron. J. , vol.38 , pp. 791-799
    • Chang, H.-T.1    Lee, C.-Y.2    Wen, C.-Y.3
  • 6
    • 69749094726 scopus 로고    scopus 로고
    • Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications
    • Mir M.T., and Ebrahim A.-S. Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications. Sens. Actuators A 117 (2005) 222-229
    • (2005) Sens. Actuators A , vol.117 , pp. 222-229
    • Mir, M.T.1    Ebrahim, A.-S.2
  • 7
    • 0034833238 scopus 로고    scopus 로고
    • Fabrication of TiNi shape memory micropump
    • Makino E., Mitsuya T., and Shibata T. Fabrication of TiNi shape memory micropump. Sens. Actuators A 88 (2001) 256-262
    • (2001) Sens. Actuators A , vol.88 , pp. 256-262
    • Makino, E.1    Mitsuya, T.2    Shibata, T.3
  • 8
    • 33750580627 scopus 로고    scopus 로고
    • Pneumatic micropumps with serially connected actuation chambers
    • Huang C.-W., Huang S.-B., and Lee G.-B. Pneumatic micropumps with serially connected actuation chambers. J. Micromech. Microeng. 16 (2006) 2265-2272
    • (2006) J. Micromech. Microeng. , vol.16 , pp. 2265-2272
    • Huang, C.-W.1    Huang, S.-B.2    Lee, G.-B.3
  • 9
    • 33847144967 scopus 로고    scopus 로고
    • Fabrication and testing of bubble powered micropumps using embedded microheater
    • Jung J.-Y., and Kwak H.-Y. Fabrication and testing of bubble powered micropumps using embedded microheater. Microfluidics Nanofluidics 3 (2007) 161-169
    • (2007) Microfluidics Nanofluidics , vol.3 , pp. 161-169
    • Jung, J.-Y.1    Kwak, H.-Y.2
  • 10
    • 2342561174 scopus 로고    scopus 로고
    • A polymeric piezoelectric micropump based on lamination technology
    • Truong T.-Q., and Nguyen N.-T. A polymeric piezoelectric micropump based on lamination technology. J. Micromech. Microeng. 14 (2004) 632-638
    • (2004) J. Micromech. Microeng. , vol.14 , pp. 632-638
    • Truong, T.-Q.1    Nguyen, N.-T.2
  • 11
    • 33747847766 scopus 로고    scopus 로고
    • A PZT insulin pump integrated with a silicon microneedle array for transdermal drug delivery
    • Ma B., Liu S., Gan Z., et al. A PZT insulin pump integrated with a silicon microneedle array for transdermal drug delivery. Microfluidics Nanofluidics 2 (2006) 417-423
    • (2006) Microfluidics Nanofluidics , vol.2 , pp. 417-423
    • Ma, B.1    Liu, S.2    Gan, Z.3
  • 12
    • 34347376804 scopus 로고    scopus 로고
    • Study on a piezoelectric micropump for the controlled drug delivery system
    • Cui Q., Liu C., and Zha X.F. Study on a piezoelectric micropump for the controlled drug delivery system. Microfluidics Nanofluidics 3 (2007) 377-390
    • (2007) Microfluidics Nanofluidics , vol.3 , pp. 377-390
    • Cui, Q.1    Liu, C.2    Zha, X.F.3
  • 14
    • 0034274488 scopus 로고    scopus 로고
    • Optimization of a circular piezoelectric bimorph for a micropump driver
    • Morris C.J., and Forster F.K. Optimization of a circular piezoelectric bimorph for a micropump driver. J. Micromech. Microeng. 10 (2000) 459-465
    • (2000) J. Micromech. Microeng. , vol.10 , pp. 459-465
    • Morris, C.J.1    Forster, F.K.2
  • 15
    • 0037446344 scopus 로고    scopus 로고
    • Analytical analysis of a circular PZT actuator for valveless micropumps
    • Li S., and Chen S. Analytical analysis of a circular PZT actuator for valveless micropumps. Sens. Actuators A 104 (2003) 151-161
    • (2003) Sens. Actuators A , vol.104 , pp. 151-161
    • Li, S.1    Chen, S.2
  • 16
    • 17544366288 scopus 로고    scopus 로고
    • A generic analytical model for microdiaphragm pumps with active valves
    • Goldschmidtböing F., Doll A., Heinrichs M., et al. A generic analytical model for microdiaphragm pumps with active valves. Micromech. Microeng. 15 (2005) 673-683
    • (2005) Micromech. Microeng. , vol.15 , pp. 673-683
    • Goldschmidtböing, F.1    Doll, A.2    Heinrichs, M.3
  • 17
    • 34147116806 scopus 로고    scopus 로고
    • A stand-alone peristaltic micropump based on piezoelectric actuation
    • Jang L.-S., Li Y.-J., Lin S.-J., et al. A stand-alone peristaltic micropump based on piezoelectric actuation. Microfluidics Nanofluidics 9 (2007) 185-194
    • (2007) Microfluidics Nanofluidics , vol.9 , pp. 185-194
    • Jang, L.-S.1    Li, Y.-J.2    Lin, S.-J.3
  • 18
    • 0032097279 scopus 로고    scopus 로고
    • The piezoelectric valve-less pump-performance enhancement analysis
    • Ullmann A. The piezoelectric valve-less pump-performance enhancement analysis. Sens. Actuators A 69 (1998) 97-105
    • (1998) Sens. Actuators A , vol.69 , pp. 97-105
    • Ullmann, A.1
  • 19
    • 0346341044 scopus 로고    scopus 로고
    • A disposable polydimethylsiloxane-based diffuser micropump actuated by piezoelectric-disc
    • Kim J.-H., Kang C.J., and Kim Y.-S. A disposable polydimethylsiloxane-based diffuser micropump actuated by piezoelectric-disc. Microelectron. Eng. 71 (2004) 119-124
    • (2004) Microelectron. Eng. , vol.71 , pp. 119-124
    • Kim, J.-H.1    Kang, C.J.2    Kim, Y.-S.3
  • 20
    • 43549124615 scopus 로고    scopus 로고
    • The structure and performance of double-chamber pumps
    • Kan J., Peng T., Tang K., et al. The structure and performance of double-chamber pumps. Piezoelectr. Acoustoopt. 28 1 (2006) 40-42
    • (2006) Piezoelectr. Acoustoopt. , vol.28 , Issue.1 , pp. 40-42
    • Kan, J.1    Peng, T.2    Tang, K.3
  • 21
    • 4644223297 scopus 로고    scopus 로고
    • Bidirectional pumping properties of a peristaltic piezoelectric micropump with simple design and chemical resistance
    • Lee D.-S., Ko J.S., and Kim Y.T. Bidirectional pumping properties of a peristaltic piezoelectric micropump with simple design and chemical resistance. Thin Solid Films 468 (2004) 285-290
    • (2004) Thin Solid Films , vol.468 , pp. 285-290
    • Lee, D.-S.1    Ko, J.S.2    Kim, Y.T.3
  • 22
    • 33845597458 scopus 로고    scopus 로고
    • Modeling and experimental validation of a piezoelectric micropump with novel no-moving-part valves
    • Izzo I., Accoto D., Menciassi A., et al. Modeling and experimental validation of a piezoelectric micropump with novel no-moving-part valves. Sens. Actuators A 133 (2007) 128-140
    • (2007) Sens. Actuators A , vol.133 , pp. 128-140
    • Izzo, I.1    Accoto, D.2    Menciassi, A.3
  • 23
    • 2342578816 scopus 로고    scopus 로고
    • Micropump based on PZT unimorph and one-way parylene valves
    • Feng G.-H., and Kim E.S. Micropump based on PZT unimorph and one-way parylene valves. J. Micromech. Microeng. 14 (2004) 429-435
    • (2004) J. Micromech. Microeng. , vol.14 , pp. 429-435
    • Feng, G.-H.1    Kim, E.S.2
  • 24
    • 0346280064 scopus 로고    scopus 로고
    • A fully polymeric micropump with piezoelectric actuator
    • Nguyen N.-T., and Truong T.-Q. A fully polymeric micropump with piezoelectric actuator. Sens. Actuators B 97 (2004) 137-143
    • (2004) Sens. Actuators B , vol.97 , pp. 137-143
    • Nguyen, N.-T.1    Truong, T.-Q.2
  • 25
    • 21744440024 scopus 로고    scopus 로고
    • Design and test of a high-performance piezoelectric micropump for drug delivery
    • Kan J., Yang Z., Peng T., et al. Design and test of a high-performance piezoelectric micropump for drug delivery. Sens. Actuators A 121 (2005) 156-161
    • (2005) Sens. Actuators A , vol.121 , pp. 156-161
    • Kan, J.1    Yang, Z.2    Peng, T.3
  • 26
    • 12244288888 scopus 로고    scopus 로고
    • Position control of a cylinder system using a piezoactuator-driven pump
    • Choi S.B., Yoo J.K., Cho M.S., and Lee Y.S. Position control of a cylinder system using a piezoactuator-driven pump. Mechatronics 15 (2005) 239-249
    • (2005) Mechatronics , vol.15 , pp. 239-249
    • Choi, S.B.1    Yoo, J.K.2    Cho, M.S.3    Lee, Y.S.4
  • 27
    • 17144408727 scopus 로고    scopus 로고
    • Development of hydraulic linear actuator using thin film SMA
    • Shin D.D., Mohanchandra K.P., and Carman G.P. Development of hydraulic linear actuator using thin film SMA. Sens. Actuators A 119 (2005) 151-156
    • (2005) Sens. Actuators A , vol.119 , pp. 151-156
    • Shin, D.D.1    Mohanchandra, K.P.2    Carman, G.P.3
  • 28
    • 0031677322 scopus 로고    scopus 로고
    • A self-priming and bubble-tolerant piezoelectric Silicon micropump for liquid and gases
    • Heidelberg, Germany, January 25-29
    • Linnemann R., Woias P., Senfft C.-D., et al. A self-priming and bubble-tolerant piezoelectric Silicon micropump for liquid and gases. Proceedings of the 11th IEEE MEMS 1998 Technical Digest. Heidelberg, Germany, January 25-29 (1998) 532-537
    • (1998) Proceedings of the 11th IEEE MEMS 1998 Technical Digest , pp. 532-537
    • Linnemann, R.1    Woias, P.2    Senfft, C.-D.3
  • 29
    • 0037240859 scopus 로고    scopus 로고
    • Dynamic response of a cantilever in liquid near a solid wall
    • Naik T., Longmire E.K., and Mantell S.C. Dynamic response of a cantilever in liquid near a solid wall. Sens. Actuators A 102 (2003) 240-325
    • (2003) Sens. Actuators A , vol.102 , pp. 240-325
    • Naik, T.1    Longmire, E.K.2    Mantell, S.C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.