A disposable polydimethylsiloxane-based diffuser micropump actuated by piezoelectric-disc

Microelectronic Engineering

Volumn 71, Issue 2, 2004, Pages 119-124

  Kim, Jin Ho ^a   Kang, C J ^a   Kim, Yong Sang ^a  

^a Myong Ji University   (South Korea)

Author keywords

Deflection; Diffuser; Flow rate; Micropump; PDMS; Piezoelectric disc

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIAPHRAGMS; DIFFUSERS (FLUID); ELECTRIC POTENTIAL; HYDROPHOBICITY; LEAD COMPOUNDS; MICROACTUATORS; PIEZOELECTRIC DEVICES; PUMPS; SHAPE MEMORY EFFECT; SILICONES; THICKNESS MEASUREMENT; THIN FILMS;

FLOW RATE; MICROPUMPS; PIEZOELECTRIC DISCS;

MICROELECTROMECHANICAL DEVICES;

EID: 0346341044     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2003.10.005     Document Type: Article

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