Optimization of a circular piezoelectric bimorph for a micropump driver

Journal of Micromechanics and Microengineering

Volumn 10, Issue 3, 2000, Pages 459-465

  Morris, Christopher J ^a   Forster, Fred K ^a  

^a UNIVERSITY OF WASHINGTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; FLUIDIC DEVICES; OPTIMIZATION; PIEZOELECTRIC DEVICES;

MICROPUMP DRIVERS; PIEZOELECTRIC BIMORPH;

MICROACTUATORS;

EID: 0034274488     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/3/323     Document Type: Article

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