Bidirectional pumping properties of a peristaltic piezoelectric micropump with simple design and chemical resistance

Thin Solid Films

Volumn 468, Issue 1-2, 2004, Pages 285-290

  Lee, Dae Sik ^a   Ko, Jong Soo ^a,b   Kim, Youn Tae ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^b Pusan National University   (South Korea)

Author keywords

Actuators; Glass; Micropump; Piezoelectric devices; Piezoelectric effect; Transducers

Indexed keywords

ACTUATORS; BONDING; DIAPHRAGMS; ELECTRIC CHARGE; ELECTRIC POTENTIAL; FLUIDICS; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; VISCOSITY;

CHAIN REACTIONS; GLASS WAFERS; LEAD ZIRCONATE TITANATE (PZT); PUMP CHAMBERS;

MICROELECTROMECHANICAL DEVICES;

EID: 4644223297     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.05.014     Document Type: Article

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