Classical dynamics simulation of the fluence dependence of sputtering properties for the 2 keV Cu → Cu(1 0 0) system

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 225, Issue 3, 2004, Pages 217-230

  Karolewski, M A ^a  

^a UNIVERSITI BRUNEI DARUSSALAM   (Brunei Darussalam)

Author keywords

Computer simulation; Sputtering

Indexed keywords

ANISOTROPY; COMPUTER SIMULATION; COPPER; MONOLAYERS; PROJECTILES; SPUTTERING; STATISTICS; SURFACE PHENOMENA;

INDUSTRIAL TECHNOLOGIES; ION SCATTERING; STANDARD DEVIATION (SD);

NUCLEAR INSTRUMENTATION;

EID: 4344674710     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.04.172     Document Type: Article

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