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Volumn 415, Issue 3, 1998, Pages 328-335
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Surface smoothing during sputtering: Mobile vacancies versus adatom detachment and diffusion
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Author keywords
Adatoms; Computer simulations; Sputtering; Surface diffusion
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Indexed keywords
ATOMS;
COMPUTER SIMULATION;
DIFFUSION;
MONTE CARLO METHODS;
OSCILLATIONS;
REACTION KINETICS;
SPUTTERING;
ADATOMS;
ANTI BRAGG SPECULAR BEAM INTENSITY OSCILLATION;
ARRHENIUS VARIATION;
MOBILE VACANCY;
PIT SIZE DISTRIBUTION;
SURFACE SMOOTHING;
SURFACE TREATMENT;
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EID: 0032500415
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/S0039-6028(98)00556-1 Document Type: Article |
Times cited : (20)
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References (28)
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