Determination of the variation in sputter yield in the SIMS transient region using MEIS

Applied Surface Science

Volumn 203-204, Issue , 2003, Pages 363-366

  Dowsett, M G ^a   Ormsby, T J ^a   Gard, F S ^a   Al Harthi, S H ^a   Guzman B ^b   McConville, C F ^a   Noakes, T C Q ^c   Bailey, P ^c  

^a UNIVERSITY OF WARWICK   (United Kingdom)

^b UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

^c DARESBURY LABORATORY   (United Kingdom)

Author keywords

Depth calibration; Erosion rate; Transient region; Ultra low energy SIMS; Ultra shallow junction

Indexed keywords

EROSION; IONS; SCATTERING; SECONDARY ION MASS SPECTROMETRY; SPUTTERING;

TRANSIENT REGIONS;

SURFACE CHEMISTRY;

EID: 12244255051     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00879-6     Document Type: Conference Paper

References (6)

1. Wittmaack K. Phil. Trans. R. Soc. London, Ser. A. 354:1996;2731.
2. M.G. Dowsett, C. Jeynes, E.A. Clark, R. Webb, S.M. Newstead, in: A. Bennighoven, et al. (Eds.), Secondary Ion Mass Spectrometry, SIMS VII, Wiley, New York, 1990, p. 615.
3. N.S. Smith, M.G. Dowsett, B. McGregor, P. Phillips, in: Werner, et al. (Eds.), Secondary Ion Mass Spectrometry, SIMS X, Wiley, New York, 1996, p. 363.
4. M.G. Dowsett, T.J. Ormsby, D.I. Elliner, G.A. Cooke, in: G. Gillen, et al. (Eds.), Secondary Ion Mass Spectrometry, SIMS XI, Wiley, New York, 1998, p. 371.
5. M.G. Dowsett, these proceedings.
6. Wittmaak K. Surf. Interf. Anal. 24:1996;389.