|
Volumn 158-159, Issue , 2002, Pages 449-456
|
The cornucopia of beam applications
|
Author keywords
Ion beam; Ion implantation; Molecular weight
|
Indexed keywords
ION IMPLANTATION;
MOLECULAR WEIGHT;
MONOMERS;
SEMICONDUCTOR MATERIALS;
BEAM APPLICATION;
COATING TECHNIQUES;
ION IMPLANTATION;
|
EID: 19244385081
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(02)00272-4 Document Type: Article |
Times cited : (8)
|
References (20)
|