Photochemical reaction of organosilane self-assembled monolayer as studied by scanning probe microscopy

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 4, 2004, Pages 1428-1432

  Sugimura, H ^a   Saito, N ^b   Ishida, Y ^b   Ikeda, I ^b   Hayashi, K ^b   Takai, O ^b  

^a KYOTO UNIVERSITY   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROPATTERNING TECHNIQUES; PHOTOCHEMICAL CHANGES; PHOTOCHEMICAL OXIDATION; PHOTOPATTERNING PROCESSES;

CHARACTERIZATION; COMPOSITION; ELLIPSOMETRY; MICROSCOPIC EXAMINATION; MONOLAYERS; OXIDATION; OXYGEN; PHOTOCHEMICAL REACTIONS; PHOTOLITHOGRAPHY; SILANES; ULTRATHIN FILMS; ULTRAVIOLET RADIATION; X RAY PHOTOELECTRON SPECTROSCOPY;

SELF ASSEMBLY;

EID: 4344622636     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1764818     Document Type: Conference Paper

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