Fabrication and characterization of a micromachined acoustic sensor with integrated optical readout

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 10, Issue 3, 2004, Pages 643-651

  Lee, Wook ^a   Hall, Neal A ^a   Zhou, Zhiping ^b   Degertekin, F Levent ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Acoustic sensor; Microelectromechanical systems (MEMS); Optical readout; Phase sensitive diffraction grating

Indexed keywords

CMOS INTEGRATED CIRCUITS; DIFFRACTION GRATINGS; ELECTROSTATIC ACTUATORS; INTEGRATED OPTOELECTRONICS; INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL INTERCONNECTS; PHOTODETECTORS; REACTIVE ION ETCHING;

ACOUSTIC SENSORS; OPTICAL READOUTS; PHASE SENSITIVE DIFFRACTION GRATINGS;

MICROSENSORS;

EID: 4344566357     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2004.829198     Document Type: Article

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