High-performance condenser microphone with fully integrated CMOS amplifier and DC-DC voltage converter

Journal of Microelectromechanical Systems

Volumn 7, Issue 4, 1998, Pages 387-394

  Pedersen, Michael ^a,b,c,d,e   Olthuis, Wouter ^a,e,f   Bergveld, Piet ^a,d,e,g  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b Knowles Electronics   (United States)

^c TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^d UNIVERSITY OF TWENTE   (Netherlands)

^e Knowles Electronics Inc   (United States)

^f EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^g Biosensor Technology   (Germany)

Author keywords

Capacitance transducers; Integrated electronics; Microphones; Polyimide films; Voltage multipliers

Indexed keywords

AMPLIFIERS (ELECTRONIC); CMOS INTEGRATED CIRCUITS; DETECTOR CIRCUITS; MICROMACHINING; MICROPHONES; POLYIMIDES; POWER CONVERTERS; SPURIOUS SIGNAL NOISE;

CAPACITIVE MICROPHONES; EQUIVALENT NOISE LEVEL (ENL); VOLTAGE MULTIPLIERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032289625     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.735346     Document Type: Article

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