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Volumn 75, Issue 3, 1999, Pages 257-268
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Micromachined optical-interference microphone
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Author keywords
[No Author keywords available]
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Indexed keywords
DETECTORS;
DIAPHRAGMS;
LIGHT INTERFERENCE;
LIGHT SOURCES;
MATHEMATICAL MODELS;
MICROELECTROMECHANICAL DEVICES;
MICROMACHINED OPTICAL-INTERFERENCE MICROPHONE;
PNEUMATIC DAMPING;
MICROPHONES;
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EID: 0032648562
PISSN: 09244247
EISSN: None
Source Type: Journal
DOI: 10.1016/S0924-4247(99)00156-9 Document Type: Article |
Times cited : (20)
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References (8)
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