SCOPUS 정보 검색 플랫폼

Volumn 50, Issue 1-2, 1995, Pages 141-146

Design for manufacture of micromachined fabry—pérot cavity-based sensors

Author keywords

Fabry P rot cavities; Micromachining

Indexed keywords

MICROMACHINING; MIRRORS; PERFORMANCE;

FABRY PEROT CAVITY BASED SENSORS;

OPTICAL SENSORS;

EID: 0029350353 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/0924-4247(96)80098-7 Document Type: Article

Times cited : (17)

References (16)

1
- 0026820704
- A silicon pressure sensor with a low-cost contactless interferometric optical readout
- (1992) Sensors and Actuators A: Physical , vol.30 , pp. 225-229
- Halg, B.¹

2
- 85024648141
- J.P. Dakin, C.A. Wade and P.B. Withers, An optical fiber pressure sensor, Fiber Optics '87: 5th Int. Conf. Fiber Optics Opto-electronics, 1987, SPIE Proc., Vol. 37, pp. 194–201

3
- 0025786395
- Fiber-optic Fabry—Pérot temperature sensor using a low-coherence light source
- (1991) J. Lightware Technol. , vol.9 , pp. 129-134
- Lee, C.E.¹ Taylor, H.F.²

4
- 0026245019
- Development of medical pressure and temperature sensors employing optical spectrum modulation
- (1991) IEEE Trans. Biomed. Eng. , vol.38 , pp. 974-980
- Wolthuis, R.A.¹ Mitchell, G.L.² Saaski, E.³ Hartl, J.C.⁴ Afromowitz, M.A.⁵

5
- 85024663788
- Y. Kim and D.P. Neikirk, Monolithically integrated optically interrogated pressure microsensor, Acoust. Soc. Am., 124th Meet., New Orleans, LA, USA, 1992, p. 2353

6
- 85024624276
- Y. Kim and D.P. Neikirk, Micromachined Fabry—Pérot cavity pressure transducer, IEEE Photonics Technol. Lett., submitted for publication

7
- 0003415938
- McGraw-Hill, New York
- (1986) Thin-Film Optical Filters
- Macleod, H.A.¹

8
- 0038340844
- Thin film narrow band optical filters
- (1976) Thin Solid Films , vol.34 , pp. 335-342
- Macleod, H.A.¹

9
- 0015431731
- Optical filters: monitoring process allowing the auto-correction of thickness errors
- (1972) Thin Solid Films , vol.13 , pp. 285-290
- Bousquet, P.¹ Fornier, A.² Kowalczyk, R.³ Pelletier, E.⁴ Roche, P.⁵

10
- 0015141961
- Weakly guiding fibers
- (1971) Applied Optics , vol.10 , pp. 2252-2258
- Gloge, D.¹

11
- 0016953886
- Loss analysis of single mode fiber slices
- (1977) Bell System Technical Journal , vol.56 , pp. 703-718
- Marcuse, D.¹

12
- 0003972070
- Pergamon Press, Oxford
- (1980) Principles of Optics
- Born, M.¹ Wolf, E.²

13
- 0004222746
- Artech House, Boston
- (1994) Sensor Technology and Devices
- Ristic, L.¹

14
- 0004040706
- Academic Press, Orlando, FL
- (1985) Handbook of Optical Constants of Solids
- Palik, E.D.¹

16
- 85024626934
- K.W. Goossen, J.A. Walker and S.C. Arney, Silicon modulator based on mechanically-active anti-reflection layer for fiber-in-the-loop applications, Opt. Fiber Commun., San Jose, CA, 1994, Vol. PDIO-1, p. 50

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.