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Applied Physics Letters

Volumn 80, Issue 20, 2002, Pages 3859-3861

Integrated optical interferometric detection method for micromachined capacitive acoustic transducers

(2) Hall, Neal A a Degertekin, F Levent a

a GEORGIA INSTITUTE OF TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BACK ELECTRODE; CAPACITIVE TRANSDUCERS; DETECTION SENSITIVITY; DIFFRACTION ORDERS; HE-NE LASERS; INTERFEROMETRIC DETECTION; LOW FREQUENCY DETECTION; MICROFABRICATED; MICROMACHINED; OPTICAL DIFFRACTIONS; PULSE ECHOES; QUARTZ SUBSTRATE; TRANSDUCER MEMBRANES; TRANSMISSION SIGNALS; TRANSPARENT SUBSTRATE; VERTICAL CAVITY SURFACE EMITTING LASER;

DIFFRACTION; EXPERIMENTS; INTERFEROMETRY; LIGHT SOURCES; QUARTZ; SUBSTRATES; SURFACE EMITTING LASERS; TRANSDUCERS; ULTRASONIC APPLICATIONS;

ACOUSTIC TRANSDUCERS;

EID: 79956044672 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1480486 Document Type: Article

Times cited : (76)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.