An integrated optical detection method for capacitive micromachined ultrasonic transducers

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2000, Pages 951-954

  Hall, Neal ^a   Degertekin, F Levent ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS;

CAPACITANCE; DIFFRACTION GRATINGS; MICROMACHINING; PHOTODETECTORS; SUBSTRATES;

ULTRASONIC TRANSDUCERS;

EID: 0034579331     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2000.922698     Document Type: Conference Paper

References (8)

1. Simulation and experimental characterization of a 2-D cMUT array element
2. Fabrication and characterization of surface micromachined capacitive ultrasonic immersion transducers
3. A surface micromachined electrostatic ultrasonic air transducer
4. Interdigital cantilevers for atomic force microscopy
5. Analysis and design of an interdigital cantilever as a displacement sensor
6. Micromachining for optical and optoelectronic systems
7. Self-consistent simulation and modeling of electrostatically deformed diaphragms
8. Flip-chip bonded arrays of monolithically integrated, microlensed vertical-cavity lasers and resonant photodetectors