Micromachined acoustic sensor array with diffraction-based optical interferometric detection

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4985, Issue , 2003, Pages 140-151

  Lee, Wook ^a   Hall, Neal ^b   Levent Degertekin, F ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Acoustic Sensor; Fabry Perot Etalon; Through Wafer Etching; Ultrasonic Imaging

Indexed keywords

ACOUSTICS; ARRAYS; MICROMACHINING; MIRRORS; OPTOELECTRONIC DEVICES; ULTRASONIC IMAGING;

ACOUSTIC SENSOR ARRAYS;

SENSORS;

EID: 0038733993     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472862     Document Type: Conference Paper

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