Fabrication of multi-layered nano-channels by reversal imprint lithography

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 876-879

  Nakajima, Masaki ^a   Yoshikawa, Takashi ^a   Sogo, Kenji ^a   Hirai, Yoshihiko ^a  

^a Osaka Prefecture University   (Japan)

Author keywords

Multilayer; Nano channel; Nanoimprint; Polymer; Reversal imprint

Indexed keywords

COOLING; GLASS TRANSITION; LITHOGRAPHY; MULTILAYERS; POLYMERS; POLYMETHYL METHACRYLATES;

NANO-CHANNEL; NANOIMPRINT; REVERSAL IMPRINT;

NANOSTRUCTURED MATERIALS;

EID: 33646029732     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.097     Document Type: Article

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