Conductive diamond probes with electroplated holder chips

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1178-1181

  Kölling, Sebastian ^a,b   Hantschel, Thomas ^a   Vandervorst, Wilfried ^a,c  

^a IMEC   (Belgium)

^b DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

AFM probes; Boron doped diamond tips; Sacrificial layer; SSRM

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIAMONDS; ELECTRIC CURRENTS; ELECTROPLATED PRODUCTS; MEMBRANES; SOLDERING;

AFM PROBES; BORON DOPED DIAMOND TIPS; SACRIFICIAL LAYERS;

CONDUCTIVE MATERIALS;

EID: 34247584595     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.047     Document Type: Article

References (7)

1. T. Hantschel, Scanning probes for nanometer scale characterization of semiconductor structures, PhD thesis, University of Leuven (2000).
2. De Wolf P., Snauwaert J., Clarysse T., Vandervorst W., and Hellemans L. Appl. Phys. Lett. 66 (1995) 1530
3. Hantschel T., Niedermann P., Trenkler T., and Vandervorst W. Appl. Phys. Lett. 76 (2000) 1603
4. J.P. Rasmussen, P.T. Tang, C. Sander, O. Hasen, P. Møller, Transducers 97, in: International Conference on Solid-State Sensors and Actuators (1997).
5. T.J. Rinke, C. Koch, Litographieprozesse ... und wie man die reproduzierbarer machen kann. Microchemicals GmbH (2005).
6. Sheiko S.S., Möller M., Reuvekamp E.M.C.M., and Zandbergen H.W. Phys. Rev. B 48 (1993) 5675
7. C. Rascon, Caractérsation 2D de dopants par microscopie de Spreading Resistance, Master thesis, LETI Grenoble (2003).