Effect of thermal stresses on temperature dependence of refractive index for Ta2O5 dielectric films

Thin Solid Films

Volumn 347, Issue 1-2, 1999, Pages 233-237

  Cheng, W H ^a   Chi, S F ^a   Chu, A K ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETRY; OPTICAL WAVEGUIDES; REFRACTIVE INDEX; SILICON; SUBSTRATES; TANTALUM COMPOUNDS; THERMAL EFFECTS; THERMAL STRESS;

ANTIRESONANT REFLECTING OPTICAL WAVEGUIDE; FILM STRESS; INDEX TEMPERATURE COEFFICIENT; MACH-ZEHNDER INTERFEROMETRY SYSTEM; TANTALUM PENTAOXIDE;

DIELECTRIC FILMS;

EID: 0345633674     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00019-X     Document Type: Article

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