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Volumn 5963, Issue , 2005, Pages

Optical and mechanical properties of thin RLVIP-Nb2O 5-films

Author keywords

Ion plating; Nb2O5; Optical absorption; Refractive index; Stress

Indexed keywords

DEPOSITION; FUSED SILICA; LIGHT ABSORPTION; NIOBIUM COMPOUNDS; REFRACTIVE INDEX; STRESSES;

EID: 33144458240     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.624851     Document Type: Conference Paper
Times cited : (6)

References (10)
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    • (1982) J. Vac. Sci. Technol. , vol.21 , Issue.3 , pp. 725-756
    • Harper, J.M.E.1    Cuomo, J.J.2    Kaufman, H.R.3
  • 3
    • 33144459750 scopus 로고
    • "Method and apparatus for the reactive vapour deposition of layers of oxides, nitrides, oxynitrides and carbides on a substrate", United States Patent, Patent Number: 4.619.748
    • E. Moll, H. K. Pulker, W. Haag, "Method and apparatus for the reactive vapour deposition of layers of oxides, nitrides, oxynitrides and carbides on a substrate", United States Patent, Patent Number: 4.619.748, 1986
    • (1986)
    • Moll, E.1    Pulker, H.K.2    Haag, W.3
  • 4
    • 0020940620 scopus 로고
    • Determination of the thickness and optical constants of amorphous silicon
    • R. Swanepoel, "Determination of the thickness and optical constants of amorphous silicon", J. Phys. E: Sci. Instrum., Vol. 16, 1986
    • (1986) J. Phys. E: Sci. Instrum. , vol.16
    • Swanepoel, R.1
  • 6
    • 33144459359 scopus 로고    scopus 로고
    • Mechanical stress in optical coatings
    • N. Kaiser, H. K. Pulker (Eds.), Springer Berlin
    • G. Strauss, Mechanical stress in optical coatings, Optical Interference Coatings, N. Kaiser, H. K. Pulker (Eds.), p. 207, Springer Berlin, 2003
    • (2003) Optical Interference Coatings , pp. 207
    • Strauss, G.1
  • 8
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    • Density-related properties of metal oxides films
    • C. Amra, N. Kaiser, H. A. Macleod, SPIE, Bellingham
    • H. K. Pulker, S. S. Schlichtherle, Density-related properties of metal oxides films, Proceedings of SPIE - Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, Vol. 5250, p. 1-11, SPIE, Bellingham, 2004
    • (2004) Proceedings of SPIE - Advances in Optical Thin Films , vol.5250 , pp. 1-11
    • Pulker, H.K.1    Schlichtherle, S.S.2
  • 9
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    • Peening in ion-assisted thin film deposition: A generalized model
    • G. Carter, "Peening in ion-assisted thin film deposition: a generalized model", J. Phys. D: Appl. Phys., Vol. 27, p. 1046-1055, 1994
    • (1994) J. Phys. D: Appl. Phys. , vol.27 , pp. 1046-1055
    • Carter, G.1
  • 10
    • 33144486710 scopus 로고    scopus 로고
    • Plasma monitoring of the RLVIP-process with a Langmuir probe
    • C. Amra, N. Kaiser, H. A. Macleod, SPIE, Bellingham
    • D. Huber, A. Hallbauer, H. K. Pulker, "Plasma monitoring of the RLVIP-process with a Langmuir probe", Proceedings of SPIE - Advances in optical thin films II, C. Amra, N. Kaiser, H. A. Macleod, Vol. 5963, SPIE, Bellingham, 2005
    • (2005) Proceedings of SPIE - Advances in Optical Thin Films II , vol.5963
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.