-
2
-
-
0020175914
-
Technology and applications of broad-beam ion sources used in sputtering, part I & II
-
J. M. E. Harper, J. J. Cuomo, H. R. Kaufman, "Technology and applications of broad-beam ion sources used in sputtering, part I & II", J. Vac. Sci. Technol., Vol. 21 (3), p. 725-756, 1982
-
(1982)
J. Vac. Sci. Technol.
, vol.21
, Issue.3
, pp. 725-756
-
-
Harper, J.M.E.1
Cuomo, J.J.2
Kaufman, H.R.3
-
3
-
-
33144459750
-
-
"Method and apparatus for the reactive vapour deposition of layers of oxides, nitrides, oxynitrides and carbides on a substrate", United States Patent, Patent Number: 4.619.748
-
E. Moll, H. K. Pulker, W. Haag, "Method and apparatus for the reactive vapour deposition of layers of oxides, nitrides, oxynitrides and carbides on a substrate", United States Patent, Patent Number: 4.619.748, 1986
-
(1986)
-
-
Moll, E.1
Pulker, H.K.2
Haag, W.3
-
4
-
-
0020940620
-
Determination of the thickness and optical constants of amorphous silicon
-
R. Swanepoel, "Determination of the thickness and optical constants of amorphous silicon", J. Phys. E: Sci. Instrum., Vol. 16, 1986
-
(1986)
J. Phys. E: Sci. Instrum.
, vol.16
-
-
Swanepoel, R.1
-
5
-
-
0019558533
-
Photothermal deflection spectroscopy and detection
-
W. B. Jackson, N. M. Amer, A. C. Boccara, D. Fournier, "Photothermal deflection spectroscopy and detection", Journal of Applied Optics, Vol. 20, p. 1333-1344, 1981
-
(1981)
Journal of Applied Optics
, vol.20
, pp. 1333-1344
-
-
Jackson, W.B.1
Amer, N.M.2
Boccara, A.C.3
Fournier, D.4
-
6
-
-
33144459359
-
Mechanical stress in optical coatings
-
N. Kaiser, H. K. Pulker (Eds.), Springer Berlin
-
G. Strauss, Mechanical stress in optical coatings, Optical Interference Coatings, N. Kaiser, H. K. Pulker (Eds.), p. 207, Springer Berlin, 2003
-
(2003)
Optical Interference Coatings
, pp. 207
-
-
Strauss, G.1
-
8
-
-
1942502866
-
Density-related properties of metal oxides films
-
C. Amra, N. Kaiser, H. A. Macleod, SPIE, Bellingham
-
H. K. Pulker, S. S. Schlichtherle, Density-related properties of metal oxides films, Proceedings of SPIE - Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, Vol. 5250, p. 1-11, SPIE, Bellingham, 2004
-
(2004)
Proceedings of SPIE - Advances in Optical Thin Films
, vol.5250
, pp. 1-11
-
-
Pulker, H.K.1
Schlichtherle, S.S.2
-
9
-
-
0028424555
-
Peening in ion-assisted thin film deposition: A generalized model
-
G. Carter, "Peening in ion-assisted thin film deposition: a generalized model", J. Phys. D: Appl. Phys., Vol. 27, p. 1046-1055, 1994
-
(1994)
J. Phys. D: Appl. Phys.
, vol.27
, pp. 1046-1055
-
-
Carter, G.1
-
10
-
-
33144486710
-
Plasma monitoring of the RLVIP-process with a Langmuir probe
-
C. Amra, N. Kaiser, H. A. Macleod, SPIE, Bellingham
-
D. Huber, A. Hallbauer, H. K. Pulker, "Plasma monitoring of the RLVIP-process with a Langmuir probe", Proceedings of SPIE - Advances in optical thin films II, C. Amra, N. Kaiser, H. A. Macleod, Vol. 5963, SPIE, Bellingham, 2005
-
(2005)
Proceedings of SPIE - Advances in Optical Thin Films II
, vol.5963
-
-
Huber, D.1
Hallbauer, A.2
Pulker, H.K.3
|