Intrinsic stress in dielectric thin films for micromechanical components

Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 116-120

  Kupfer, H ^a   Flugel T ^a   Richter, F ^a   Schlott, P ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Dielectric multilayer; Magnetron sputtering; Mechanical stress; Micromechanical mirrors

Indexed keywords

ION BOMBARDMENT; MAGNETRON SPUTTERING; MIRRORS; MULTILAYERS; STRESS ANALYSIS; TENSILE STRESS; THIN FILMS;

DIELECTRIC MULTILAYER;

DIELECTRIC FILMS;

EID: 0033339349     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00114-0     Document Type: Article

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