Correlation between structure and properties of Er2O3 nanocrystalline thin films

Journal of Non-Crystalline Solids

Volumn 354, Issue 19-25, 2008, Pages 2853-2857

  Giangregorio, Maria M ^a   Sacchetti, Alberto ^a   Losurdo, Maria ^a   Capezzuto, Pio ^a   Bruno, Giovanni ^a  

^a CNR   (Italy)

Author keywords

Ellipsometry

Indexed keywords

CMOS INTEGRATED CIRCUITS; DENSITY (SPECIFIC GRAVITY); METALLORGANIC CHEMICAL VAPOR DEPOSITION; SINGLE CRYSTALS; THIN FILMS;

CMOS DEVICES; COLUMNAR STRUCTURE;

NANOCRYSTALLINE MATERIALS;

EID: 42649100968     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2007.10.102     Document Type: Article

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