The influence of DC bias on the displacement and sensor output of self-sensitive piezoelectric microcantilevers

Journal of Micromechanics and Microengineering

Volumn 18, Issue 3, 2008, Pages

  Kobayashi, T ^a   Maeda, R ^a   Itoh, T ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS; MULTILAYERS; RESONANCE; SENSORS; WAVEFORM ANALYSIS;

ACTUATION VOLTAGE; PIEZOELECTRIC MICROCANTILEVERS; RESONANT ACTUATION;

CANTILEVER BEAMS;

EID: 42549127802     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/3/035025     Document Type: Article

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