Characterization and modeling of a piezoelectric micromachined ultrasonic transducer with a very large length/width aspect ratio

Journal of Micromechanics and Microengineering

Volumn 18, Issue 2, 2008, Pages

  Choi, H S ^a   Ding, J L ^a   Bandyopadhyay, A ^a   Anderson, M J ^b   Bose, S ^a  

^a Washington State University   (United States)

^b UNIVERSITY OF IDAHO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; EQUIVALENT CIRCUITS; MICROMACHINING; PIEZOELECTRIC TRANSDUCERS;

PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS; REALISTIC PREDICTION; THIN MEMBRANE TRANSDUCERS;

ULTRASONIC TRANSDUCERS;

EID: 42549094849     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/2/025037     Document Type: Article

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