Influence of top electrode design on pMUTs performance

Sensors and Actuators, A: Physical

Volumn 135, Issue 2, 2007, Pages 613-619

  Choi, Hongsoo ^a   Dalakoti, Abhishek ^a   Bose, Susmita ^a   Bandyopadhyay, Amit ^a  

^a Washington State University   (United States)

Author keywords

MEMS; Micromachined ultrasonic transducers; PZT; Silicon membranes

Indexed keywords

ELECTRIC FIELD MEASUREMENT; MEMBRANES; MEMS; MICROMACHINING; NATURAL FREQUENCIES; PIEZOELECTRIC TRANSDUCERS; REMANENCE;

FILM QUALITY; PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS; SILICON MEMBRANES;

ULTRASONIC TRANSDUCERS;

EID: 34047117506     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.08.022     Document Type: Article

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