Simulation and characterization of Piezoelectric Micromachined Ultrasonic Transducers (PMUT's) based on PZT/SOI membranes

Integrated Ferroelectrics

Volumn 54, Issue , 2003, Pages 557-564

  Baborowski, Jacek ^a   Ledermann, Nicolas ^a   Muralt, Paul ^a   Schmitt, Daniel ^b  

^a EPFL   (Switzerland)

^b FRAUNHOFER INSTITUTE FOR BIOMEDICAL ENGINEERING   (Germany)

Author keywords

FEA simulations; pMUTS; PZT

Indexed keywords

ELECTRODES; FINITE ELEMENT METHOD; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; THIN FILMS;

PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS (PMUT); SILICON MEMBRANES;

PIEZOELECTRIC TRANSDUCERS;

EID: 33751282919     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580390258930     Document Type: Article

References (5)

1. I. Ladabaum, X. C. Jin, H. T. Soh, A. Atalar, and B. T. Khuri-Jakub, App. Phys. Lett. 69, 3674-3676 (1998).
2. J. J. Bernstein, S. L. Finberg, K. Houston, L. C. Niles, H. D. Chen, and L. E. Cross, IEEE Trans. UFFC 44, 960-969 (1997).
3. G. Perçin, A. Atalar, F. L. Degertekin, and B. T. Khuri-Yakub, Appt. Phys. Lett. 72, 1397-1399 (1998).
4. P. Muralt, D. Schmitt, N. Ledermann, J. Baborowski, P. K. Weber, W. Steichen, S. Petitgrand, A. Bosseboeuf, N. Setter, and P. Gaucher, Proceedings of IEEE Ultrasonic Symposium. Atlanta, USA, pp. 907-911, 2001.
5. N. Ledermann, P. Muralt, J. Baborowski, S. Gentil, K. Mukati, M. Cantoni, A. Seifert, and N. Setter, Sensors and Actuators A, in press (2003).