Coupling bulge testing and nanoindention to characterize materials properties of bulk micromachined structures

Microsystem Technologies

Volumn 11, Issue 4-5, 2005, Pages 298-302

  Kennedy, M S ^a   Olson, A L ^a   Raupp, J C ^a   Moody, N R ^b   Bahr, D F ^a  

^a WASHINGTON STATE UNIVERSITY   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DEPOSITION; ELASTIC MODULI; INDENTATION; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; OPTIMIZATION; RAPID THERMAL ANNEALING; RESIDUAL STRESSES; RESONANCE; SOL-GELS; STIFFNESS;

CONTINUOUS STIFFNESS METHOD (CSM); GEOMETRIC SHAPES; MICROMACHINED STRUCTURES; NANOINDENTATION;

MICROMACHINING;

EID: 21044453750     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0439-7     Document Type: Conference Paper

References (22)

1. Zakar E; Dubey M; Polcawich R; Piekarski B; Piekarz R; Conrad J; Widuta R (2002) Study of PZT film stress in multilayer structures for MEMS devices. Mat Res Soc Symp Proc 605:287-292
2. Xiang Y; Chen X; Vlassak JJ (2002) The mechanical properties of electroplated Cu thin films measured by means of bulge test technique. Mat Res Soc Symp Proc 695:189-194
3. Paviot VM; Vlassak JJ; Nix WD (1995) Measuring the mechanical properties of thin metal films by means of bulge testing of micromachined windows. Mat Res Soc Symp Proc 356:579-584
4. Cieslar M; Karimi A; Martin J-L (2002) Bulge test characterization of static softening and dynamic instabilities in foils of an Al-based alloy. Mat Res Soc Symp Proc 695:127-132
5. Sengupta SS; Park AM; Payne DA (1997) Integrates electroceramics: densification and stress development in sol-gel derived thin films. Integrated Ferroelelectrics 14:193-200
6. Nakladal A; Buchhold P; Kohler R; Gerlach G; Stavrev M; Wenzel C; Baumann K; Nowak B (1998) Bulge test investigation of the influence of moisture on mechanical properties of thin polymer layers. Mat Res Soc Symp Proc 518:105-110
7. Yu S; Yao K; Hock FTE (2003) Effects of poly(ethylene glycol) additive molecular weight on the microstructure and properties of sol-gel-derived lead zirconate titanate thin films. J Mater Res 10:737-741
8. Walter V; Delobelle P; Le Moal P; Joseph E; Collet M (2002) A piezo-mechanical characterization of PZT thick films screenprinted on alumina substrate. Sensors Actuators: A. physical 96:157-166
9. Whalen S; Thompson M; Bahr D; Richards C; Richards R (2003) Design fabrication and testing of the P3 micro heat engine. Sensors Actuators: A. Physical 104:200-208
10. Olson BW; Randall LM; Richards CD; Richards RF; Bahr DF (2001) Relationships between microstructure and reliability in PZT MEMS. Mat Res Soc Symp Proc 666:F611-F619
11. Kennedy MS; Bahr DF; Richards CD; Richards RF (2003) Residual stress control to optimize PZT MEMS performance. Mat Res Soc Symp 741:J5.37.1-J5.37.6
12. 2/Ta/Pt/PZT/Pt stacks for MEMS application. In: IEEE International Symposium on Application of Ferroelectrics 2:757-759
13. Olson AL; Skinner JL; Bahr DF; Richards CD; Richards RF (2003) Fracture behavior of thin film PZT on silicon MEMS and membranes. Mat Res Soc Symp 750:Y8.27.1-Y8.27.6
14. Pharr GM; Oliver WC (1992) An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments J Mater Res 7:1564-1563
15. Bahr DF; Robach JS; Wright JS; Francis LF; Gerberich WW (1999) Mechanical deformation of PZT thin films for MEMS applications. Mat Sci Eng A259:126-131
16. Bonnette E; Delobelle P; Bonder L (1997) Two interferometric methods for the mechanical characterization of thin films by bulge testing tests application to single crystal of silicon. J Mater Res 12: 2234-2248
17. Vlassak JJ; Nix WD (1992) A new bulge test technique for the determination of young's modulus and poisson's ratio of thin films. J Mat Res 7:3242-3249
18. Small M; Vlassak J; Powell S (1993) Accuracy and reliability of bulge testing experiments. Mat Res Symp 308:159-164
19. Shojaei OR; Karimi A (1998) Mechanical properties of TiN thin films measured using nanoindentation and bulge test. Mat Res Symp Proc 522:245-250
20. Stoney GG (1909) The tension of metallic films deposited by electrolysis. Proc R Soc London Ser A82:172-175
21. 3/Pt thin-films stacks for integrates ferroelectric capacitors. I Appl Phys 78:1926-1933
22. 0.47)03 thin films deposited on Pt/Ti/Si(100) substrates. Acta Mater 50:4241-4254