Fabrication of ultrasonic arrays with 7 μm PZT thick films as ultrasonic emitter for object detection in air

Sensors and Actuators, A: Physical

Volumn 123-124, Issue , 2005, Pages 614-619

  Zhu, Hong ^a,c   Miao, Jianmin ^a   Wang, Zhihong ^b   Zhao, Changlei ^b   Zhu, Weiguang ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c DATA STORAGE INSTITUTE   (Singapore)

Author keywords

Micromachining; PZT thick film; Ultrasonic array

Indexed keywords

LEAD COMPOUNDS; MICROMACHINING; NANOSTRUCTURED MATERIALS; SILICON WAFERS; SOL-GELS; THICK FILMS; TRANSDUCERS;

PZT THICK FILMS; SLURRY PROCESSES; ULTRASONIC ARRAYS; ULTRASONIC EMISSION;

ULTRASONIC WAVES;

EID: 24944589897     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.03.037     Document Type: Conference Paper

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