Texture development, microstructure evolution, and crystallization of chemically derived PZT thin films

Journal of the American Ceramic Society

Volumn 81, Issue 1, 1998, Pages 97-105

  Chen, San Yuan ^a   Chen, I Wei ^b,c  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b UNIVERSITY OF MICHIGAN   (United States)

^c AMERICAN CERAMIC SOCIETY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; CRYSTALLIZATION; ELECTRIC PROPERTIES; HEAT TREATMENT; HEATING; PEROVSKITE; PYROLYSIS; SOLUTIONS; TEXTURES;

CRYSTALLIZATION TEMPERATURE; LEAD ZIRCONIA TITANATE; METALLO ORGANIC DECOMPOSITION; SOL GEL PROCESS;

THIN FILMS;

EID: 0031703699     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1998.tb02300.x     Document Type: Article

References (29)

1. 3, PZT and PLZT Thin films," Br. Ceram. Proc. 36, 107-21 (1985).
2. 3 Thin Film Processing," Integr. Ferroelectr. 2, 243-54 (1992).
3. J. Fukushima, K. Kodaira, and T. Matsushita, "Preparation of Ferroelectric PZT Films by Thermal Decomposition of Organometallic Compounds," J. Mater. Sci., 19, 595-98 (1984).
4. R. W. Vest, "Metallo-organic Decomposition (MOD) Processing of Ferroelectric and Electro-optical Films: A Review," Ferroelectrics, 102, 53-68 (1990).
5. R. W. Vest, "Electronic Films from Metallo-organic Precursors"; pp. 303-41 in Ceramic Films and Coating. Edited by J. B. Wachtman and R. A. Haber. Noyes Publications, Park Ridge, NJ, 1993.
6. K. C. Chen and J. D. Mackenzie, "Crystallization Kinetics of Metalloorganic Derived PZT Thin Films," Mater. Res. Soc. Symp. Proc., 180, 663-68 (1990).
7. R. A. Lipeles, D. J. Coleman, and M. S. Leung, "Effects of Hydrolysis on Metallo-organic solution Deposition on PZT Films," Mater. Res. Soc. Svmp. Proc., 73, 665-70 (1986).
8. G. H. Haertling, "PZT Thin Films Prepared from Acetate Precursors," Ferroelectrics, 116, 51-63 (1991).
9. G. A. C. M. Spierings, J. B. A. van Zon, M. Klee, and P. K. Larsen, "Influence of Platinum-Based Electrodes on the Microstructure of Sol-Gel and MOD Prepared Lead Zirconate Titanate Films," Integr. Ferroelectr., 3 [3] 280-89 (1993).
10. 3 (x = 0.2-0.75) Films: Comparison of Metallo-organic Decomposition and Sol-Gel Processes," J. Appl. Phys., 72 [4] 1566-76 (1992).
11. M. Klee, P. Schnabel, W. Brand, and R. Mauczok, "Ferroelectric Layers Made by Thermal Decomposition of Organometallic Compounds"; pp. 685-88 in Proceedings of the 7th IEEE International Symposium on Applications of Ferroelectrics. Edited by S. B. Krupanidhi and S. K. Kurtz. Institute of Electrical and Electronics Engineering, Piscataway, NJ, 1990.
12. T. Tani, Z. Xu, and D. A. Payne, "Preferred Orientation for Sol-Gel Derived PLZT Thin Layers"; pp. 269-74 in Materials Research Society Symposium Proceedings, Vol. 310, Ferroelectric Thin Films III. Materials Research Society, Pittsburgh, PA, 1993.
13. 3 Thin Films: I, The Role of Pb-Rich Intermediate Phases," J. Am. Ceram. Soc., 77 [9] 2332-36 (1994).
14. 3 Thin Films: II. Heat Treatment and Compositional Effects," J. Am. Cream. Soc., 77 [9] 2337-44 (1994).
15. S. Hirano, T. Yugo, K. Kikuta, Y. Araki, M. Saitoh, and S. Ogasahara, "Synthesis of Highly Oriented Lead Zirconate-Lead Titanate Film Using Metallo-organics," J. Am. Ceram. Soc., 75 [10] 2785-89 (1992).
16. 3 Thin Films by Spin Coating and Metalorganic Decomposition," J. Appl. Phys., 70 [4] 2290-98 (1991).
17. K. G. Brooks, I. M. Reaney, R. Klissurska, Y. Huang, L. Bursill, and N. Setter, "Orientation of Rapid Thermally Annealed Lead Zirconate Titanate Thin Films on (111) Pt Substractes," J. Mater. Res., 7 [10] 2540-53 (1994).
18. 3, x = 0.4) Thin Films," J. Am. Ceram. Soc., 79 [2] 495-98 (1996).
19. I. M. Reaney, K. G. Brooks, R. Klissurska, C. Pawlaczyk, and N. Setter, "Use of Transmission Electron Microscopy for the Characterization of Rapid Thermally Annealed, Solution-Gel, Lead Zirconate Titanate Films," J. Am. Ceram. Soc., 77 [5] 1209-16 (1994).
20. 3 Thin Films of Different Textures on Ti/Pt Electrodes," Microelectroni. Eng., 29, 293-96 (1995).
21. S. Y. Chen and I-W. Chen, "Comparative Study of Electrical Properties in [100] and [111]-Oriented PZT Films," Jpn. J. Appl. Phys., Part 1, 36 [7A] 4451-58 (1997).
22. C. D. E. Lakeman, J.-F. Campion, and D. A. Payne. "Factors Affecting the Sol-Gel Processing of PZT Thin Layers," Ferroelectr. Films, 25, 413-39 (1992).
23. K. Aoki, Y. Fukuda, and A. Nishimura, "Preparation of (100) Oriented Lead Zirconate Titanate films by Sol-Gel Technique," Jpn. J. Appl. Phys., Part 1, 32 [9B] 4147-49 (1993).
24. R. A. Lipeles, N. A. Ives, and M. S. Leung, "Sol-Gel Processing of Lead Zironate Titanate films"; pp. 320-26 Ultrastructure Processing of Ceramics, Glasses and Composetes. Edited by L. L. Hench and D. R. Ulrich. Wiley, New York, 1986.
25. C. K. Kwok, S. B. Desu, and D. P. Vijay, "Modified Sol-Gel Process for Preparation of Lead Zirconate Titanate Thin Films," Ferroelectr. Lett., 16, 143-56 (1993).
26. 3 Thin Films Prepared by Hybrid Metal-organic Decomposition," J. Mater. Res., 7 [7] 1876-82 (1992).
27. S. A. Myers and L. N. Chapin, "Microstructural Characterization of Ferroelectric Thin Films for Nonvolatile Memory Applications," Mater. Res. Soc. Symp. Proc., 200, 231-36 (1990).
28. H. D. Keith and F. J. Padden, Jr., "Spherulitic Crystallization from the Melt. I. Fractionation and Impurity Segregation and Their Influence on Crystalline Morphology," J. Appl. Phys., 15 [4] 1270-85 (1964).
29. A. H. Carim, B. A. Tuttle, D. H. Doughty, and S. L. Martinez, "Microstructure of Solution-Processed Lead Zirconate Titanate (PZT) Thin Films," J. Am. Ceram. Soc., 74 [6] 1455-58 (1991).