Numerical modelling of impact rupture in polysilicon microsystems

Computational Mechanics

Volumn 42, Issue 2, 2008, Pages 251-259

  Corigliano, Alberto ^a   Cacchione, Fabrizio ^a   Frangi, Attilio ^a   Zerbini, Sarah ^b  

^a POLITECNICO DI MILANO   (Italy)

^b STMICROELECTRONICS   (Italy)

Author keywords

Fracture simulation; Impact rupture; Micro electro mechanical systems (MEMS); Numerical simulation

Indexed keywords

ANISOTROPY; FINITE ELEMENT METHOD; MEMS; MICROSYSTEMS; NUMERICAL METHODS; POLYCRYSTALS; TWO DIMENSIONAL;

FRACTURE SIMULATION; IMPACT RUPTURE; VORONOI TESSELLATION;

POLYSILICON;

EID: 42449087759     PISSN: 01787675     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00466-007-0231-5     Document Type: Article

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