Micro-scale simulation of impact rupture in polysilicon MEMS

Fracture of Nano and Engineering Materials and Structures - Proceedings of the 16th European Conference of Fracture

Volumn , Issue , 2006, Pages 647-648

  Corigliano, Alberto ^a   Cacchione, Fabrizio ^a   Frangi, Attilio ^a   De Masi, Biagio ^b  

^a POLITECNICO DI MILANO   (Italy)

^b STMICROELECTRONICS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84908308118     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/1-4020-4972-2_320     Document Type: Conference Paper

References (4)

1. Corigliano, A., De Masi, B., Frangi, A., Comi, C., J. of Microelectromechanical Systems, vol. 13, 2, 200-219, 2004.
2. Espinosa, H.D., Zavattieri, P.D., Mechanics of Materials, vol. 35, 333-364, 2003.
3. Espinosa, H.D., Zavattieri, P.D., Mechanics of Materials, vol. 35, 365-394, 2003.
4. Mullen, R.L., Ballarini, R., Yin, L., Heuer, A.H., Acta Materialia, vol. 45, 2247-2255 1997.