An experimental/computational approach to identify moduli and residual stress in MEMS radio-frequency switches

Experimental Mechanics

Volumn 43, Issue 3, 2003, Pages 309-316

  Espinosa, H D ^a   Zhu, Y ^a   Fischer, M ^a   Hutchinson, J ^b  

^a NORTHWESTERN UNIVERSITY   (United States)

^b HARVARD UNIVERSITY   (United States)

Author keywords

MEMS; Moduli; Nanoindentation; Residual stress; Rf switch

Indexed keywords

COMPUTER SIMULATION; ELASTIC MODULI; RESIDUAL STRESSES;

ALUMINUM MEMBRANES;

MICROELECTROMECHANICAL DEVICES;

ELASTIC PROPERTY; MICROELECTROMECHANICAL SYSTEM; STRESS-STRAIN ANALYSIS; TESTING METHOD; YOUNG MODULUS;

EID: 0141994431     PISSN: 00144851     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02410529     Document Type: Article

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