Reliability of capacitive RF MEMS switches at high and low temperatures

International Journal of RF and Microwave Computer-Aided Engineering

Volumn 14, Issue 4, 2004, Pages 317-328

  Zhu, Yong ^a   Espinosa, Horacio D ^a  

^a Northwestern University   (United States)

Author keywords

Coupled analysis; Mechanical testing; MEMS; MEMS modeling; RF switch, reliability

Indexed keywords

COUPLED ANALYSIS; MEMS MODELING; RF SWITCH;

AIRCRAFT; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MECHANICAL TESTING; OPTIMIZATION; SATELLITE COMMUNICATION SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 3042725223     PISSN: 10964290     EISSN: None     Source Type: Journal    
DOI: 10.1002/mmce.20015     Document Type: Article

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